X-ray Ultramicroscope (XuM)
The X-ray ultramicroscope (XuM) is a high resolution (<100nm) X-ray microscope accessory for a scanning electron microscope (SEM).
The system uses the finely focussed electron beam of the SEM to generate a small intense source of X-rays using a geometrically constrained target. These X-rays penetrate the sample under investigation and are collected by a high performance direct detection low noise CCD detector.
A schematic of the arrangement of the XuM in the SEM chamber is shown below: -
The XuM has a number of useful and unique attributes:
- The system is non-destructive. Using x-ray imaging, internal structures can be imaged without changing the sample or damaging it by invasive sample preparation.
- Because of the extremely high resolution of the detector and the very small source size the images produced have a very intense phase signature. This makes it possible to image weakly absorbing materials and makes it very easy to see voids, cracks, pits, delamination etc.
- As with all XRT systems, the XuM has full phase retrieval capability allowing intensity to be quantitatively derived from the phase image.
- The very high resolution also means that very small features are easily seen, revealing fine structure that is very difficult to image by any other technique.
- As well as being able to produce planar images of extremely high resolution the XuM offers stereo imaging plus full 3D tomography, reconstruction and solid rendering.
The system is fully computer controlled and is able to operate fully automatically enabling unattended imaging runs, for example overnight to maximise tool utilisation.
The system has a comprehensive hypertext help which provides operation, X-ray theory and applications help as shown below: -
Download the following poster which describes the performance of the UltraMicroscope:
